1/8/2011	7:49:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	7:49:52 PM	Recipe started at 7:49 PM
1/8/2011	7:49:52 PM	H2 valve closed
1/8/2011	7:49:52 PM	BCl3 valve closed
1/8/2011	7:49:52 PM	PH3 valve closed
1/8/2011	7:49:52 PM	SiCl4 pre valve closed
1/8/2011	7:49:52 PM	SiCl4 post valve closed
1/8/2011	7:49:52 PM	Main Vac valve closed
1/8/2011	7:49:52 PM	Bypass valve closed
1/8/2011	7:49:52 PM	Bubbler valve closed
1/8/2011	7:49:52 PM	Helium valve opened
1/8/2011	7:49:52 PM	Helium MFC set to  500.000000
1/8/2011	7:49:52 PM	H2 MFC set to  0.000000
1/8/2011	7:49:52 PM	BCl3 MFC set to  0.000000
1/8/2011	7:49:52 PM	PHl3 MFC set to  0.000000
1/8/2011	7:49:52 PM	SiCl4 MFC set to  0.000000
1/8/2011	7:49:52 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	7:49:52 PM	Tube furnace set to 0
1/8/2011	7:51:12 PM	Helium valve closed
1/8/2011	7:51:12 PM	H2 valve closed
1/8/2011	7:51:12 PM	BCl3 valve closed
1/8/2011	7:51:12 PM	PH3 valve closed
1/8/2011	7:51:12 PM	SiCl4 pre valve closed
1/8/2011	7:51:12 PM	SiCl4 post valve closed
1/8/2011	7:51:12 PM	Main Vac valve closed
1/8/2011	7:51:12 PM	Bypass valve closed
1/8/2011	7:51:12 PM	Bubbler valve closed
1/8/2011	7:51:12 PM	Helium MFC set to  0.000000
1/8/2011	7:51:12 PM	H2 MFC set to  0.000000
1/8/2011	7:51:12 PM	BCl3 MFC set to  0.000000
1/8/2011	7:51:12 PM	PHl3 MFC set to  0.000000
1/8/2011	7:51:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	7:51:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	7:51:12 PM	Tube furnace set to 0
1/8/2011	7:51:13 PM	Run finished at 7:51 PM
1/8/2011	7:51:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	7:51:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	7:51:18 PM	Recipe started at 7:51 PM
1/8/2011	7:51:18 PM	H2 valve closed
1/8/2011	7:51:18 PM	BCl3 valve closed
1/8/2011	7:51:18 PM	PH3 valve closed
1/8/2011	7:51:18 PM	SiCl4 pre valve closed
1/8/2011	7:51:18 PM	SiCl4 post valve closed
1/8/2011	7:51:18 PM	Main Vac valve closed
1/8/2011	7:51:18 PM	Bypass valve closed
1/8/2011	7:51:18 PM	Bubbler valve closed
1/8/2011	7:51:18 PM	Helium valve opened
1/8/2011	7:51:18 PM	Helium MFC set to  500.000000
1/8/2011	7:51:18 PM	H2 MFC set to  0.000000
1/8/2011	7:51:18 PM	BCl3 MFC set to  0.000000
1/8/2011	7:51:18 PM	PHl3 MFC set to  0.000000
1/8/2011	7:51:18 PM	SiCl4 MFC set to  0.000000
1/8/2011	7:51:18 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	7:51:18 PM	Tube furnace set to 0
1/8/2011	7:51:18 PM	Helium valve closed
1/8/2011	7:51:18 PM	H2 valve closed
1/8/2011	7:51:18 PM	BCl3 valve closed
1/8/2011	7:51:18 PM	PH3 valve closed
1/8/2011	7:51:18 PM	SiCl4 pre valve closed
1/8/2011	7:51:18 PM	SiCl4 post valve closed
1/8/2011	7:51:18 PM	Main Vac valve closed
1/8/2011	7:51:18 PM	Bypass valve closed
1/8/2011	7:51:18 PM	Bubbler valve closed
1/8/2011	7:51:18 PM	Helium MFC set to  0.000000
1/8/2011	7:51:18 PM	H2 MFC set to  0.000000
1/8/2011	7:51:18 PM	BCl3 MFC set to  0.000000
1/8/2011	7:51:18 PM	PHl3 MFC set to  0.000000
1/8/2011	7:51:18 PM	SiCl4 MFC set to  0.000000
1/8/2011	7:51:18 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	7:51:19 PM	Tube furnace set to 0
1/8/2011	7:51:19 PM	Run finished at 7:51 PM
1/8/2011	7:51:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	8:00:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2011	8:00:57 PM	Recipe started at 8:00 PM
1/8/2011	8:00:57 PM	Helium valve closed
1/8/2011	8:00:57 PM	H2 valve closed
1/8/2011	8:00:57 PM	BCl3 valve closed
1/8/2011	8:00:57 PM	PH3 valve closed
1/8/2011	8:00:57 PM	SiCl4 pre valve closed
1/8/2011	8:00:57 PM	SiCl4 post valve closed
1/8/2011	8:00:57 PM	Main Vac valve closed
1/8/2011	8:00:57 PM	Bubbler valve closed
1/8/2011	8:00:57 PM	Bypass valve opened
1/8/2011	8:00:57 PM	Helium MFC set to  0.000000
1/8/2011	8:00:57 PM	H2 MFC set to  0.000000
1/8/2011	8:00:57 PM	BCl3 MFC set to  0.000000
1/8/2011	8:00:57 PM	PHl3 MFC set to  0.000000
1/8/2011	8:00:57 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:00:57 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:00:57 PM	Tube furnace set to 0
1/8/2011	8:01:58 PM	Helium valve closed
1/8/2011	8:01:58 PM	H2 valve closed
1/8/2011	8:01:58 PM	BCl3 valve closed
1/8/2011	8:01:58 PM	PH3 valve closed
1/8/2011	8:01:58 PM	SiCl4 pre valve closed
1/8/2011	8:01:58 PM	SiCl4 post valve closed
1/8/2011	8:01:58 PM	Bubbler valve closed
1/8/2011	8:01:58 PM	Main Vac valve opened
1/8/2011	8:01:58 PM	Bypass valve opened
1/8/2011	8:01:58 PM	Helium MFC set to  0.000000
1/8/2011	8:01:58 PM	H2 MFC set to  0.000000
1/8/2011	8:01:58 PM	BCl3 MFC set to  0.000000
1/8/2011	8:01:58 PM	PHl3 MFC set to  0.000000
1/8/2011	8:01:58 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:01:58 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:01:58 PM	Tube furnace set to 0
1/8/2011	8:01:58 PM	Run finished at 8:01 PM
1/8/2011	8:01:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2011	8:02:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	8:02:10 PM	Recipe started at 8:02 PM
1/8/2011	8:02:10 PM	H2 valve closed
1/8/2011	8:02:10 PM	BCl3 valve closed
1/8/2011	8:02:10 PM	PH3 valve closed
1/8/2011	8:02:10 PM	SiCl4 pre valve closed
1/8/2011	8:02:10 PM	SiCl4 post valve closed
1/8/2011	8:02:10 PM	Main Vac valve closed
1/8/2011	8:02:10 PM	Bypass valve closed
1/8/2011	8:02:10 PM	Bubbler valve closed
1/8/2011	8:02:10 PM	Helium valve opened
1/8/2011	8:02:10 PM	Helium MFC set to  500.000000
1/8/2011	8:02:10 PM	H2 MFC set to  0.000000
1/8/2011	8:02:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:02:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:02:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:02:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:02:10 PM	Tube furnace set to 0
1/8/2011	8:03:31 PM	Helium valve closed
1/8/2011	8:03:31 PM	H2 valve closed
1/8/2011	8:03:31 PM	BCl3 valve closed
1/8/2011	8:03:31 PM	PH3 valve closed
1/8/2011	8:03:31 PM	SiCl4 pre valve closed
1/8/2011	8:03:31 PM	SiCl4 post valve closed
1/8/2011	8:03:31 PM	Main Vac valve closed
1/8/2011	8:03:31 PM	Bypass valve closed
1/8/2011	8:03:31 PM	Bubbler valve closed
1/8/2011	8:03:31 PM	Helium MFC set to  0.000000
1/8/2011	8:03:31 PM	H2 MFC set to  0.000000
1/8/2011	8:03:31 PM	BCl3 MFC set to  0.000000
1/8/2011	8:03:31 PM	PHl3 MFC set to  0.000000
1/8/2011	8:03:31 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:03:31 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:03:31 PM	Tube furnace set to 0
1/8/2011	8:03:31 PM	Run finished at 8:03 PM
1/8/2011	8:03:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	8:03:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2011	8:03:52 PM	Recipe started at 8:03 PM
1/8/2011	8:03:52 PM	Helium valve closed
1/8/2011	8:03:52 PM	H2 valve closed
1/8/2011	8:03:52 PM	BCl3 valve closed
1/8/2011	8:03:52 PM	PH3 valve closed
1/8/2011	8:03:52 PM	SiCl4 pre valve closed
1/8/2011	8:03:52 PM	SiCl4 post valve closed
1/8/2011	8:03:52 PM	Main Vac valve closed
1/8/2011	8:03:52 PM	Bubbler valve closed
1/8/2011	8:03:52 PM	Bypass valve opened
1/8/2011	8:03:52 PM	Helium MFC set to  0.000000
1/8/2011	8:03:52 PM	H2 MFC set to  0.000000
1/8/2011	8:03:52 PM	BCl3 MFC set to  0.000000
1/8/2011	8:03:52 PM	PHl3 MFC set to  0.000000
1/8/2011	8:03:52 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:03:52 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:03:53 PM	Tube furnace set to 0
1/8/2011	8:04:35 PM	Helium valve closed
1/8/2011	8:04:35 PM	H2 valve closed
1/8/2011	8:04:35 PM	BCl3 valve closed
1/8/2011	8:04:35 PM	PH3 valve closed
1/8/2011	8:04:35 PM	SiCl4 pre valve closed
1/8/2011	8:04:35 PM	SiCl4 post valve closed
1/8/2011	8:04:35 PM	Bubbler valve closed
1/8/2011	8:04:35 PM	Main Vac valve opened
1/8/2011	8:04:35 PM	Bypass valve opened
1/8/2011	8:04:35 PM	Helium MFC set to  0.000000
1/8/2011	8:04:35 PM	H2 MFC set to  0.000000
1/8/2011	8:04:35 PM	BCl3 MFC set to  0.000000
1/8/2011	8:04:35 PM	PHl3 MFC set to  0.000000
1/8/2011	8:04:35 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:04:35 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:04:35 PM	Tube furnace set to 0
1/8/2011	8:04:36 PM	Run finished at 8:04 PM
1/8/2011	8:04:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2011	8:04:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/8/2011	8:05:09 PM	Recipe started at 8:05 PM
1/8/2011	8:05:09 PM	Helium valve closed
1/8/2011	8:05:09 PM	H2 valve closed
1/8/2011	8:05:09 PM	BCl3 valve closed
1/8/2011	8:05:09 PM	PH3 valve closed
1/8/2011	8:05:09 PM	SiCl4 pre valve closed
1/8/2011	8:05:09 PM	SiCl4 post valve closed
1/8/2011	8:05:09 PM	Main Vac valve closed
1/8/2011	8:05:09 PM	Bubbler valve closed
1/8/2011	8:05:09 PM	Bypass valve opened
1/8/2011	8:05:09 PM	Helium MFC set to  0.000000
1/8/2011	8:05:09 PM	H2 MFC set to  0.000000
1/8/2011	8:05:09 PM	BCl3 MFC set to  0.000000
1/8/2011	8:05:09 PM	PHl3 MFC set to  0.000000
1/8/2011	8:05:09 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:05:09 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:05:09 PM	Tube furnace set to 0
1/8/2011	8:05:09 PM	Helium valve closed
1/8/2011	8:05:09 PM	H2 valve closed
1/8/2011	8:05:09 PM	BCl3 valve closed
1/8/2011	8:05:09 PM	PH3 valve closed
1/8/2011	8:05:09 PM	SiCl4 pre valve closed
1/8/2011	8:05:09 PM	SiCl4 post valve closed
1/8/2011	8:05:09 PM	Bubbler valve closed
1/8/2011	8:05:09 PM	Main Vac valve opened
1/8/2011	8:05:09 PM	Bypass valve opened
1/8/2011	8:05:09 PM	Helium MFC set to  0.000000
1/8/2011	8:05:09 PM	H2 MFC set to  0.000000
1/8/2011	8:05:09 PM	BCl3 MFC set to  0.000000
1/8/2011	8:05:09 PM	PHl3 MFC set to  0.000000
1/8/2011	8:05:09 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:05:09 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:05:09 PM	Tube furnace set to 0
1/8/2011	8:06:09 PM	H2 valve closed
1/8/2011	8:06:09 PM	BCl3 valve closed
1/8/2011	8:06:09 PM	PH3 valve closed
1/8/2011	8:06:09 PM	SiCl4 pre valve closed
1/8/2011	8:06:09 PM	SiCl4 post valve closed
1/8/2011	8:06:09 PM	Bubbler valve closed
1/8/2011	8:06:09 PM	Helium valve opened
1/8/2011	8:06:09 PM	Main Vac valve opened
1/8/2011	8:06:09 PM	Bypass valve opened
1/8/2011	8:06:09 PM	Helium MFC set to  100.000000
1/8/2011	8:06:09 PM	H2 MFC set to  0.000000
1/8/2011	8:06:09 PM	BCl3 MFC set to  0.000000
1/8/2011	8:06:09 PM	PHl3 MFC set to  0.000000
1/8/2011	8:06:09 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:06:09 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:06:10 PM	Tube furnace set to 0
1/8/2011	8:07:10 PM	Helium valve closed
1/8/2011	8:07:10 PM	H2 valve closed
1/8/2011	8:07:10 PM	BCl3 valve closed
1/8/2011	8:07:10 PM	PH3 valve closed
1/8/2011	8:07:10 PM	SiCl4 pre valve closed
1/8/2011	8:07:10 PM	SiCl4 post valve closed
1/8/2011	8:07:10 PM	Bubbler valve closed
1/8/2011	8:07:10 PM	Main Vac valve opened
1/8/2011	8:07:10 PM	Bypass valve opened
1/8/2011	8:07:10 PM	Helium MFC set to  0.000000
1/8/2011	8:07:10 PM	H2 MFC set to  0.000000
1/8/2011	8:07:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:07:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:07:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:07:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:07:10 PM	Tube furnace set to 0
1/8/2011	8:08:10 PM	H2 valve closed
1/8/2011	8:08:10 PM	BCl3 valve closed
1/8/2011	8:08:10 PM	PH3 valve closed
1/8/2011	8:08:10 PM	SiCl4 pre valve closed
1/8/2011	8:08:10 PM	SiCl4 post valve closed
1/8/2011	8:08:10 PM	Bubbler valve closed
1/8/2011	8:08:10 PM	Helium valve opened
1/8/2011	8:08:10 PM	Main Vac valve opened
1/8/2011	8:08:10 PM	Bypass valve opened
1/8/2011	8:08:10 PM	Helium MFC set to  100.000000
1/8/2011	8:08:10 PM	H2 MFC set to  0.000000
1/8/2011	8:08:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:08:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:08:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:08:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:08:10 PM	Tube furnace set to 0
1/8/2011	8:09:10 PM	Helium valve closed
1/8/2011	8:09:10 PM	H2 valve closed
1/8/2011	8:09:10 PM	BCl3 valve closed
1/8/2011	8:09:10 PM	PH3 valve closed
1/8/2011	8:09:10 PM	SiCl4 pre valve closed
1/8/2011	8:09:10 PM	SiCl4 post valve closed
1/8/2011	8:09:10 PM	Bubbler valve closed
1/8/2011	8:09:10 PM	Main Vac valve opened
1/8/2011	8:09:10 PM	Bypass valve opened
1/8/2011	8:09:10 PM	Helium MFC set to  0.000000
1/8/2011	8:09:10 PM	H2 MFC set to  0.000000
1/8/2011	8:09:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:09:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:09:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:09:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:09:10 PM	Tube furnace set to 0
1/8/2011	8:10:10 PM	H2 valve closed
1/8/2011	8:10:10 PM	BCl3 valve closed
1/8/2011	8:10:10 PM	PH3 valve closed
1/8/2011	8:10:10 PM	SiCl4 pre valve closed
1/8/2011	8:10:10 PM	SiCl4 post valve closed
1/8/2011	8:10:10 PM	Bubbler valve closed
1/8/2011	8:10:10 PM	Helium valve opened
1/8/2011	8:10:10 PM	Main Vac valve opened
1/8/2011	8:10:10 PM	Bypass valve opened
1/8/2011	8:10:10 PM	Helium MFC set to  100.000000
1/8/2011	8:10:10 PM	H2 MFC set to  0.000000
1/8/2011	8:10:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:10:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:10:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:10:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:10:10 PM	Tube furnace set to 0
1/8/2011	8:11:10 PM	Helium valve closed
1/8/2011	8:11:10 PM	H2 valve closed
1/8/2011	8:11:10 PM	BCl3 valve closed
1/8/2011	8:11:10 PM	PH3 valve closed
1/8/2011	8:11:10 PM	SiCl4 pre valve closed
1/8/2011	8:11:10 PM	SiCl4 post valve closed
1/8/2011	8:11:10 PM	Bubbler valve closed
1/8/2011	8:11:10 PM	Main Vac valve opened
1/8/2011	8:11:10 PM	Bypass valve opened
1/8/2011	8:11:10 PM	Helium MFC set to  0.000000
1/8/2011	8:11:10 PM	H2 MFC set to  0.000000
1/8/2011	8:11:10 PM	BCl3 MFC set to  0.000000
1/8/2011	8:11:10 PM	PHl3 MFC set to  0.000000
1/8/2011	8:11:10 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:11:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:11:11 PM	Tube furnace set to 0
1/8/2011	8:12:11 PM	H2 valve closed
1/8/2011	8:12:11 PM	BCl3 valve closed
1/8/2011	8:12:11 PM	PH3 valve closed
1/8/2011	8:12:11 PM	SiCl4 pre valve closed
1/8/2011	8:12:11 PM	SiCl4 post valve closed
1/8/2011	8:12:11 PM	Bubbler valve closed
1/8/2011	8:12:11 PM	Helium valve opened
1/8/2011	8:12:11 PM	Main Vac valve opened
1/8/2011	8:12:11 PM	Bypass valve opened
1/8/2011	8:12:11 PM	Helium MFC set to  100.000000
1/8/2011	8:12:11 PM	H2 MFC set to  0.000000
1/8/2011	8:12:11 PM	BCl3 MFC set to  0.000000
1/8/2011	8:12:11 PM	PHl3 MFC set to  0.000000
1/8/2011	8:12:11 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:12:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:12:11 PM	Tube furnace set to 0
1/8/2011	8:13:11 PM	Helium valve closed
1/8/2011	8:13:11 PM	H2 valve closed
1/8/2011	8:13:11 PM	BCl3 valve closed
1/8/2011	8:13:11 PM	PH3 valve closed
1/8/2011	8:13:11 PM	SiCl4 pre valve closed
1/8/2011	8:13:11 PM	SiCl4 post valve closed
1/8/2011	8:13:11 PM	Bubbler valve closed
1/8/2011	8:13:11 PM	Main Vac valve opened
1/8/2011	8:13:11 PM	Bypass valve opened
1/8/2011	8:13:11 PM	Helium MFC set to  0.000000
1/8/2011	8:13:11 PM	H2 MFC set to  0.000000
1/8/2011	8:13:11 PM	BCl3 MFC set to  0.000000
1/8/2011	8:13:11 PM	PHl3 MFC set to  0.000000
1/8/2011	8:13:11 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:13:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:13:11 PM	Tube furnace set to 0
1/8/2011	8:14:11 PM	H2 valve closed
1/8/2011	8:14:11 PM	BCl3 valve closed
1/8/2011	8:14:11 PM	PH3 valve closed
1/8/2011	8:14:11 PM	SiCl4 pre valve closed
1/8/2011	8:14:11 PM	SiCl4 post valve closed
1/8/2011	8:14:11 PM	Bubbler valve closed
1/8/2011	8:14:11 PM	Helium valve opened
1/8/2011	8:14:11 PM	Main Vac valve opened
1/8/2011	8:14:11 PM	Bypass valve opened
1/8/2011	8:14:11 PM	Helium MFC set to  100.000000
1/8/2011	8:14:11 PM	H2 MFC set to  0.000000
1/8/2011	8:14:11 PM	BCl3 MFC set to  0.000000
1/8/2011	8:14:11 PM	PHl3 MFC set to  0.000000
1/8/2011	8:14:11 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:14:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:14:11 PM	Tube furnace set to 0
1/8/2011	8:15:11 PM	Helium valve closed
1/8/2011	8:15:11 PM	H2 valve closed
1/8/2011	8:15:11 PM	BCl3 valve closed
1/8/2011	8:15:11 PM	PH3 valve closed
1/8/2011	8:15:11 PM	SiCl4 pre valve closed
1/8/2011	8:15:11 PM	SiCl4 post valve closed
1/8/2011	8:15:11 PM	Bubbler valve closed
1/8/2011	8:15:11 PM	Main Vac valve opened
1/8/2011	8:15:11 PM	Bypass valve opened
1/8/2011	8:15:11 PM	Helium MFC set to  0.000000
1/8/2011	8:15:11 PM	H2 MFC set to  0.000000
1/8/2011	8:15:11 PM	BCl3 MFC set to  0.000000
1/8/2011	8:15:11 PM	PHl3 MFC set to  0.000000
1/8/2011	8:15:11 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:15:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:15:11 PM	Tube furnace set to 0
1/8/2011	8:16:11 PM	H2 valve closed
1/8/2011	8:16:11 PM	BCl3 valve closed
1/8/2011	8:16:11 PM	PH3 valve closed
1/8/2011	8:16:11 PM	SiCl4 pre valve closed
1/8/2011	8:16:11 PM	SiCl4 post valve closed
1/8/2011	8:16:11 PM	Bubbler valve closed
1/8/2011	8:16:11 PM	Helium valve opened
1/8/2011	8:16:11 PM	Main Vac valve opened
1/8/2011	8:16:11 PM	Bypass valve opened
1/8/2011	8:16:11 PM	Helium MFC set to  100.000000
1/8/2011	8:16:11 PM	H2 MFC set to  0.000000
1/8/2011	8:16:11 PM	BCl3 MFC set to  0.000000
1/8/2011	8:16:11 PM	PHl3 MFC set to  0.000000
1/8/2011	8:16:11 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:16:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:16:12 PM	Tube furnace set to 0
1/8/2011	8:17:12 PM	Helium valve closed
1/8/2011	8:17:12 PM	H2 valve closed
1/8/2011	8:17:12 PM	BCl3 valve closed
1/8/2011	8:17:12 PM	PH3 valve closed
1/8/2011	8:17:12 PM	SiCl4 pre valve closed
1/8/2011	8:17:12 PM	SiCl4 post valve closed
1/8/2011	8:17:12 PM	Bubbler valve closed
1/8/2011	8:17:12 PM	Main Vac valve opened
1/8/2011	8:17:12 PM	Bypass valve opened
1/8/2011	8:17:12 PM	Helium MFC set to  0.000000
1/8/2011	8:17:12 PM	H2 MFC set to  0.000000
1/8/2011	8:17:12 PM	BCl3 MFC set to  0.000000
1/8/2011	8:17:12 PM	PHl3 MFC set to  0.000000
1/8/2011	8:17:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:17:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:17:12 PM	Tube furnace set to 0
1/8/2011	8:18:12 PM	H2 valve closed
1/8/2011	8:18:12 PM	BCl3 valve closed
1/8/2011	8:18:12 PM	PH3 valve closed
1/8/2011	8:18:12 PM	SiCl4 pre valve closed
1/8/2011	8:18:12 PM	SiCl4 post valve closed
1/8/2011	8:18:12 PM	Bubbler valve closed
1/8/2011	8:18:12 PM	Helium valve opened
1/8/2011	8:18:12 PM	Main Vac valve opened
1/8/2011	8:18:12 PM	Bypass valve opened
1/8/2011	8:18:12 PM	Helium MFC set to  100.000000
1/8/2011	8:18:12 PM	H2 MFC set to  0.000000
1/8/2011	8:18:12 PM	BCl3 MFC set to  0.000000
1/8/2011	8:18:12 PM	PHl3 MFC set to  0.000000
1/8/2011	8:18:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:18:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:18:12 PM	Tube furnace set to 0
1/8/2011	8:19:12 PM	Helium valve closed
1/8/2011	8:19:12 PM	H2 valve closed
1/8/2011	8:19:12 PM	BCl3 valve closed
1/8/2011	8:19:12 PM	PH3 valve closed
1/8/2011	8:19:12 PM	SiCl4 pre valve closed
1/8/2011	8:19:12 PM	SiCl4 post valve closed
1/8/2011	8:19:12 PM	Bubbler valve closed
1/8/2011	8:19:12 PM	Main Vac valve opened
1/8/2011	8:19:12 PM	Bypass valve opened
1/8/2011	8:19:12 PM	Helium MFC set to  0.000000
1/8/2011	8:19:12 PM	H2 MFC set to  0.000000
1/8/2011	8:19:12 PM	BCl3 MFC set to  0.000000
1/8/2011	8:19:12 PM	PHl3 MFC set to  0.000000
1/8/2011	8:19:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:19:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:19:12 PM	Tube furnace set to 0
1/8/2011	8:20:12 PM	H2 valve closed
1/8/2011	8:20:12 PM	BCl3 valve closed
1/8/2011	8:20:12 PM	PH3 valve closed
1/8/2011	8:20:12 PM	SiCl4 pre valve closed
1/8/2011	8:20:12 PM	SiCl4 post valve closed
1/8/2011	8:20:12 PM	Bubbler valve closed
1/8/2011	8:20:12 PM	Helium valve opened
1/8/2011	8:20:12 PM	Main Vac valve opened
1/8/2011	8:20:12 PM	Bypass valve opened
1/8/2011	8:20:12 PM	Helium MFC set to  100.000000
1/8/2011	8:20:12 PM	H2 MFC set to  0.000000
1/8/2011	8:20:12 PM	BCl3 MFC set to  0.000000
1/8/2011	8:20:12 PM	PHl3 MFC set to  0.000000
1/8/2011	8:20:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:20:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:20:12 PM	Tube furnace set to 0
1/8/2011	8:21:12 PM	Helium valve closed
1/8/2011	8:21:12 PM	H2 valve closed
1/8/2011	8:21:12 PM	BCl3 valve closed
1/8/2011	8:21:12 PM	PH3 valve closed
1/8/2011	8:21:12 PM	SiCl4 pre valve closed
1/8/2011	8:21:12 PM	SiCl4 post valve closed
1/8/2011	8:21:12 PM	Bubbler valve closed
1/8/2011	8:21:12 PM	Main Vac valve opened
1/8/2011	8:21:12 PM	Bypass valve opened
1/8/2011	8:21:12 PM	Helium MFC set to  0.000000
1/8/2011	8:21:12 PM	H2 MFC set to  0.000000
1/8/2011	8:21:12 PM	BCl3 MFC set to  0.000000
1/8/2011	8:21:12 PM	PHl3 MFC set to  0.000000
1/8/2011	8:21:12 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:21:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:21:13 PM	Tube furnace set to 0
1/8/2011	8:22:13 PM	H2 valve closed
1/8/2011	8:22:13 PM	BCl3 valve closed
1/8/2011	8:22:13 PM	PH3 valve closed
1/8/2011	8:22:13 PM	SiCl4 pre valve closed
1/8/2011	8:22:13 PM	SiCl4 post valve closed
1/8/2011	8:22:13 PM	Bubbler valve closed
1/8/2011	8:22:13 PM	Helium valve opened
1/8/2011	8:22:13 PM	Main Vac valve opened
1/8/2011	8:22:13 PM	Bypass valve opened
1/8/2011	8:22:13 PM	Helium MFC set to  100.000000
1/8/2011	8:22:13 PM	H2 MFC set to  0.000000
1/8/2011	8:22:13 PM	BCl3 MFC set to  0.000000
1/8/2011	8:22:13 PM	PHl3 MFC set to  0.000000
1/8/2011	8:22:13 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:22:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:22:13 PM	Tube furnace set to 0
1/8/2011	8:23:13 PM	Helium valve closed
1/8/2011	8:23:13 PM	H2 valve closed
1/8/2011	8:23:13 PM	BCl3 valve closed
1/8/2011	8:23:13 PM	PH3 valve closed
1/8/2011	8:23:13 PM	SiCl4 pre valve closed
1/8/2011	8:23:13 PM	SiCl4 post valve closed
1/8/2011	8:23:13 PM	Bubbler valve closed
1/8/2011	8:23:13 PM	Main Vac valve opened
1/8/2011	8:23:13 PM	Bypass valve opened
1/8/2011	8:23:13 PM	Helium MFC set to  0.000000
1/8/2011	8:23:13 PM	H2 MFC set to  0.000000
1/8/2011	8:23:13 PM	BCl3 MFC set to  0.000000
1/8/2011	8:23:13 PM	PHl3 MFC set to  0.000000
1/8/2011	8:23:13 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:23:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:23:13 PM	Tube furnace set to 0
1/8/2011	8:24:13 PM	H2 valve closed
1/8/2011	8:24:13 PM	BCl3 valve closed
1/8/2011	8:24:13 PM	PH3 valve closed
1/8/2011	8:24:13 PM	SiCl4 pre valve closed
1/8/2011	8:24:13 PM	SiCl4 post valve closed
1/8/2011	8:24:13 PM	Bubbler valve closed
1/8/2011	8:24:13 PM	Helium valve opened
1/8/2011	8:24:13 PM	Main Vac valve opened
1/8/2011	8:24:13 PM	Bypass valve opened
1/8/2011	8:24:13 PM	Helium MFC set to  100.000000
1/8/2011	8:24:13 PM	H2 MFC set to  0.000000
1/8/2011	8:24:13 PM	BCl3 MFC set to  0.000000
1/8/2011	8:24:13 PM	PHl3 MFC set to  0.000000
1/8/2011	8:24:13 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:24:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:24:13 PM	Tube furnace set to 0
1/8/2011	8:25:13 PM	Helium valve closed
1/8/2011	8:25:13 PM	H2 valve closed
1/8/2011	8:25:13 PM	BCl3 valve closed
1/8/2011	8:25:13 PM	PH3 valve closed
1/8/2011	8:25:13 PM	SiCl4 pre valve closed
1/8/2011	8:25:13 PM	SiCl4 post valve closed
1/8/2011	8:25:13 PM	Bubbler valve closed
1/8/2011	8:25:13 PM	Main Vac valve opened
1/8/2011	8:25:13 PM	Bypass valve opened
1/8/2011	8:25:13 PM	Helium MFC set to  0.000000
1/8/2011	8:25:13 PM	H2 MFC set to  0.000000
1/8/2011	8:25:13 PM	BCl3 MFC set to  0.000000
1/8/2011	8:25:13 PM	PHl3 MFC set to  0.000000
1/8/2011	8:25:13 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:25:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:25:13 PM	Tube furnace set to 0
1/8/2011	8:25:14 PM	Run finished at 8:25 PM
1/8/2011	8:25:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/8/2011	8:29:36 PM	Helium MFC set to  100.000000
1/8/2011	8:29:37 PM	Helium valve opened
1/8/2011	8:38:05 PM	Helium valve closed
1/8/2011	8:38:08 PM	Helium MFC set to  0.000000
1/8/2011	8:39:40 PM	Helium MFC set to  100.000000
1/8/2011	8:39:42 PM	Helium valve opened
1/8/2011	8:40:33 PM	Helium valve closed
1/8/2011	8:40:36 PM	Helium MFC set to  0.000000
1/8/2011	8:41:24 PM	Recipe started at 8:41 PM
1/8/2011	8:41:24 PM	Helium valve closed
1/8/2011	8:41:24 PM	BCl3 valve closed
1/8/2011	8:41:24 PM	PH3 valve closed
1/8/2011	8:41:24 PM	SiCl4 pre valve closed
1/8/2011	8:41:24 PM	SiCl4 post valve closed
1/8/2011	8:41:24 PM	Main Vac valve closed
1/8/2011	8:41:24 PM	Bypass valve closed
1/8/2011	8:41:24 PM	Bubbler valve closed
1/8/2011	8:41:24 PM	H2 valve opened
1/8/2011	8:41:24 PM	Helium MFC set to  0.000000
1/8/2011	8:41:24 PM	H2 MFC set to  500.000000
1/8/2011	8:41:24 PM	BCl3 MFC set to  0.000000
1/8/2011	8:41:24 PM	PHl3 MFC set to  0.000000
1/8/2011	8:41:24 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:41:24 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:41:25 PM	Tube furnace set to 1000
1/8/2011	8:42:47 PM	Helium valve closed
1/8/2011	8:42:47 PM	BCl3 valve closed
1/8/2011	8:42:47 PM	PH3 valve closed
1/8/2011	8:42:47 PM	SiCl4 pre valve closed
1/8/2011	8:42:47 PM	SiCl4 post valve closed
1/8/2011	8:42:47 PM	Main Vac valve closed
1/8/2011	8:42:47 PM	Bypass valve closed
1/8/2011	8:42:47 PM	H2 valve opened
1/8/2011	8:42:47 PM	Bubbler valve opened
1/8/2011	8:42:47 PM	Helium MFC set to  0.000000
1/8/2011	8:42:47 PM	H2 MFC set to  500.000000
1/8/2011	8:42:47 PM	BCl3 MFC set to  0.000000
1/8/2011	8:42:47 PM	PHl3 MFC set to  0.000000
1/8/2011	8:42:47 PM	SiCl4 MFC set to  0.000000
1/8/2011	8:42:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	8:42:47 PM	Tube furnace set to 1000
1/8/2011	9:02:47 PM	Helium valve closed
1/8/2011	9:02:47 PM	BCl3 valve closed
1/8/2011	9:02:47 PM	PH3 valve closed
1/8/2011	9:02:47 PM	SiCl4 pre valve closed
1/8/2011	9:02:47 PM	SiCl4 post valve closed
1/8/2011	9:02:47 PM	Main Vac valve closed
1/8/2011	9:02:47 PM	Bypass valve closed
1/8/2011	9:02:47 PM	H2 valve opened
1/8/2011	9:02:47 PM	Bubbler valve opened
1/8/2011	9:02:47 PM	Helium MFC set to  0.000000
1/8/2011	9:02:47 PM	H2 MFC set to  500.000000
1/8/2011	9:02:47 PM	BCl3 MFC set to  0.000000
1/8/2011	9:02:47 PM	PHl3 MFC set to  0.000000
1/8/2011	9:02:47 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:02:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:02:47 PM	Tube furnace set to 750
1/8/2011	9:22:47 PM	H2 valve closed
1/8/2011	9:22:47 PM	BCl3 valve closed
1/8/2011	9:22:47 PM	PH3 valve closed
1/8/2011	9:22:47 PM	SiCl4 pre valve closed
1/8/2011	9:22:47 PM	SiCl4 post valve closed
1/8/2011	9:22:47 PM	Main Vac valve closed
1/8/2011	9:22:47 PM	Bypass valve closed
1/8/2011	9:22:47 PM	Helium valve opened
1/8/2011	9:22:47 PM	Bubbler valve opened
1/8/2011	9:22:47 PM	Helium MFC set to  500.000000
1/8/2011	9:22:47 PM	H2 MFC set to  0.000000
1/8/2011	9:22:47 PM	BCl3 MFC set to  0.000000
1/8/2011	9:22:47 PM	PHl3 MFC set to  0.000000
1/8/2011	9:22:47 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:22:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:22:47 PM	Tube furnace set to 0
1/8/2011	9:34:32 PM	Helium valve closed
1/8/2011	9:34:32 PM	H2 valve closed
1/8/2011	9:34:32 PM	BCl3 valve closed
1/8/2011	9:34:32 PM	PH3 valve closed
1/8/2011	9:34:32 PM	SiCl4 pre valve closed
1/8/2011	9:34:32 PM	SiCl4 post valve closed
1/8/2011	9:34:32 PM	Main Vac valve closed
1/8/2011	9:34:32 PM	Bypass valve closed
1/8/2011	9:34:32 PM	Bubbler valve closed
1/8/2011	9:34:32 PM	Helium MFC set to  0.000000
1/8/2011	9:34:32 PM	H2 MFC set to  0.000000
1/8/2011	9:34:32 PM	BCl3 MFC set to  0.000000
1/8/2011	9:34:32 PM	PHl3 MFC set to  0.000000
1/8/2011	9:34:32 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:34:32 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:34:32 PM	Tube furnace set to 0
1/8/2011	9:34:32 PM	Run finished at 9:34 PM
1/8/2011	9:34:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	9:34:42 PM	Recipe started at 9:34 PM
1/8/2011	9:34:42 PM	H2 valve closed
1/8/2011	9:34:42 PM	BCl3 valve closed
1/8/2011	9:34:42 PM	PH3 valve closed
1/8/2011	9:34:42 PM	SiCl4 pre valve closed
1/8/2011	9:34:42 PM	SiCl4 post valve closed
1/8/2011	9:34:42 PM	Main Vac valve closed
1/8/2011	9:34:42 PM	Bypass valve closed
1/8/2011	9:34:42 PM	Bubbler valve closed
1/8/2011	9:34:42 PM	Helium valve opened
1/8/2011	9:34:42 PM	Helium MFC set to  500.000000
1/8/2011	9:34:42 PM	H2 MFC set to  0.000000
1/8/2011	9:34:42 PM	BCl3 MFC set to  0.000000
1/8/2011	9:34:42 PM	PHl3 MFC set to  0.000000
1/8/2011	9:34:42 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:34:42 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:34:42 PM	Tube furnace set to 0
1/8/2011	9:34:42 PM	Helium valve closed
1/8/2011	9:34:42 PM	H2 valve closed
1/8/2011	9:34:42 PM	BCl3 valve closed
1/8/2011	9:34:42 PM	PH3 valve closed
1/8/2011	9:34:42 PM	SiCl4 pre valve closed
1/8/2011	9:34:42 PM	SiCl4 post valve closed
1/8/2011	9:34:42 PM	Main Vac valve closed
1/8/2011	9:34:42 PM	Bypass valve closed
1/8/2011	9:34:42 PM	Bubbler valve closed
1/8/2011	9:34:42 PM	Helium MFC set to  0.000000
1/8/2011	9:34:42 PM	H2 MFC set to  0.000000
1/8/2011	9:34:42 PM	BCl3 MFC set to  0.000000
1/8/2011	9:34:42 PM	PHl3 MFC set to  0.000000
1/8/2011	9:34:42 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:34:42 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:34:42 PM	Tube furnace set to 0
1/8/2011	9:34:43 PM	Run finished at 9:34 PM
1/8/2011	9:34:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2011	9:36:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2011	9:36:28 PM	Recipe started at 9:36 PM
1/8/2011	9:36:28 PM	Helium valve closed
1/8/2011	9:36:28 PM	H2 valve closed
1/8/2011	9:36:28 PM	BCl3 valve closed
1/8/2011	9:36:28 PM	PH3 valve closed
1/8/2011	9:36:28 PM	SiCl4 pre valve closed
1/8/2011	9:36:28 PM	SiCl4 post valve closed
1/8/2011	9:36:28 PM	Main Vac valve closed
1/8/2011	9:36:28 PM	Bubbler valve closed
1/8/2011	9:36:28 PM	Bypass valve opened
1/8/2011	9:36:28 PM	Helium MFC set to  0.000000
1/8/2011	9:36:28 PM	H2 MFC set to  0.000000
1/8/2011	9:36:28 PM	BCl3 MFC set to  0.000000
1/8/2011	9:36:28 PM	PHl3 MFC set to  0.000000
1/8/2011	9:36:28 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:36:28 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:36:28 PM	Tube furnace set to 0
1/8/2011	9:37:21 PM	Helium valve closed
1/8/2011	9:37:21 PM	H2 valve closed
1/8/2011	9:37:21 PM	BCl3 valve closed
1/8/2011	9:37:21 PM	PH3 valve closed
1/8/2011	9:37:21 PM	SiCl4 pre valve closed
1/8/2011	9:37:21 PM	SiCl4 post valve closed
1/8/2011	9:37:21 PM	Bubbler valve closed
1/8/2011	9:37:21 PM	Main Vac valve opened
1/8/2011	9:37:21 PM	Bypass valve opened
1/8/2011	9:37:21 PM	Helium MFC set to  0.000000
1/8/2011	9:37:21 PM	H2 MFC set to  0.000000
1/8/2011	9:37:21 PM	BCl3 MFC set to  0.000000
1/8/2011	9:37:21 PM	PHl3 MFC set to  0.000000
1/8/2011	9:37:21 PM	SiCl4 MFC set to  0.000000
1/8/2011	9:37:21 PM	Bypass solenoid MFC set to  0.000000
1/8/2011	9:37:21 PM	Tube furnace set to 0
1/8/2011	9:37:22 PM	Run finished at 9:37 PM
1/8/2011	9:37:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
